JPH0446547U - - Google Patents
Info
- Publication number
- JPH0446547U JPH0446547U JP8809490U JP8809490U JPH0446547U JP H0446547 U JPH0446547 U JP H0446547U JP 8809490 U JP8809490 U JP 8809490U JP 8809490 U JP8809490 U JP 8809490U JP H0446547 U JPH0446547 U JP H0446547U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- electrostatic chuck
- light
- supports
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005611 electricity Effects 0.000 claims 1
- 230000003068 static effect Effects 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8809490U JPH0446547U (en]) | 1990-08-22 | 1990-08-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8809490U JPH0446547U (en]) | 1990-08-22 | 1990-08-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0446547U true JPH0446547U (en]) | 1992-04-21 |
Family
ID=31821035
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8809490U Pending JPH0446547U (en]) | 1990-08-22 | 1990-08-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0446547U (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62208647A (ja) * | 1986-02-20 | 1987-09-12 | Fujitsu Ltd | ウエハ−保持機構 |
-
1990
- 1990-08-22 JP JP8809490U patent/JPH0446547U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62208647A (ja) * | 1986-02-20 | 1987-09-12 | Fujitsu Ltd | ウエハ−保持機構 |